ϵ ֽô 17 ϵ, ֽ, ӹα SKƼ() ǥ̻ , SKƼ() ڱݾ 1,508 űڸ â 105 ϴ ھذ üߴ.
̹ ھذ ü SKƼ 2,500 Ը NF3(ȭ) Ϻ ͵ 210 Ը ۹ İ ϱ ؼ̴.
SKƼ 2001 Ư Ҹ ó NF3(ȭ) ù ȭ , 9,200MT ְ 꼳 ϰ, 40% 1 ̴.
ݵü ÷ ü ֿ , ݵü ̼ȭ 3D NAND Ȯ, OLED Ȯ ϴ NF3 信 ϱ ߰ 2,500 Ը ϰ ִ.
ϵ ֽ 濵 췯 2007 ݱ 5ȸ 6,300 ڰ ̾.
SKƼ Ϻ ͵䰡 ϴ SK͵ڴ CH3F(÷ź) 1 꼳 20 Ϲݱ Ǽ Ϸϰ, C4F6(ȭŸ) ΰ CF ȹ̴.
İ Ǹ ʿ κи ܵΰ ϴ ݵü İ Ǵ Ư . ݵü ̼ȭ 3D Ȯ꿡 İ 䰡 ̴.
ظ 2õ500 Ը Ǹ, Ư SK͵ڰ ȹ ź․Ҽ(CF) 3D ÷ ȭ 뷮 þ ̴.
SKƼ ۿ ȭֽ(WF6), Ƕ(SiH4), ̽Ƕ(Si2H6) پ Ư ϴ Ư о ۷ι Ȯ ġ ϰ ִ.
źб ִ , 4õ600 Ը ѵ ̾ ؿ 弼 ̾ ̴.
, SKƼ ߱․븸․Ϻ Ǹ ΰ ߱ 1,000 Ը NF3 ü , ݵü ü ϴ SKƮ ۹ ϴ SK μ ϰ ִ.
ϵ 츮 ο ȭ ִٸ, ñ ڿ SKƼ 縦 ǥϰ ȯ ȸ ϰڴ١ ߴ
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